Abstract This paper introduces the development process of a High-repetition-frequency high-voltage narrow pulse source . This equipment includes pulse signal source, drive circuit and power amplification circuit. The article describes in detail about the methods of design pulse signal source with FPGA, pulse shaping circuit in the drive circuit design and reduce the parasitic parameters of circuit in the power amplifier circuit. When Device work at 1MHz repetition frequency, the rising edge of the high voltage pulse keep in 14ns on 50Ω load.